Oilfield services firm Baker Hughes said on Tuesday it would buy Chart Industries in a $13.6 billion all-cash deal, including debt, topping a previously-agreed merger offer that Chart struck with rival Flowserve last month.

Baker Hughes Co. agreed to buy industrial equipment maker Chart Industries Inc. for about $9.6 billion in cash, expanding the oilfield service giant’s reach into liquefied natural gas, data centers and other technologies.

Oilfield services provider Baker Hughes has reached a deal to acquire equipment manufacturer Chart Industries in an all-cash deal worth $13.6 billion.